Buiding Blocks for Probe Stations or build your own specialized test fixture.
Posted on 07/13/09
PSECKPE6
6in vacuum chuck + stage for probe station, Z axis adjust
150 mm / 6" Vacuum Chuck and Stage assembly for probe station. When building your own test fixture or custom probe station this buiding block will solve your thorniest issue. Picture shows 4" version. Stage assembly supplies X-Y and theta adjustments. Chuck will hold down device under test through vacuum. Pattern supports 6", 4", 2" wafers. Vacuum pump will be needed and is not included in this offer. FEATURES: Ideal for small wafers, 6" or less Chuck stage front and side adjustable Chuck theta coarse adjustment Z axis adjustment with micrometer Backlash-free movement SPECIFICATIONS: 6" stainless steel vacuum chuck Chuck stage allows 6" x 6" travel in X-Y directions Chuck theta: coarse adjustment up to 30 degrees Z-axis fine adjustment with micrometer.
1 turn (50 units) equals 0.25 mm, 1 unit is 5 µm 75 x 75 mm mounting holes Total height from mounting plane to top of chuck 140 mm / 5.5" ± 2 mm Net weight: 5.5 kg or 12 lbs Operational Requirements: 7 liter/min 250 mmHg vacuum supply
Please contact us by email. Or you can reach us at (+1)361-384-0754. Or we will call you back, just supply your phone number! More Contact options here. Policies for shipping, payment, and returns here. Please send any comments or questions regarding this site to webmaster. Copyright 2007, 2008, tech-specialities, Inc. All rights reserved.