Cryogenic Probe Station System with temperature controlled vacuum chamber, microscope, on-site setup and and operating instructions through factory engineer.

Posted on August 22, 2010

PSESLC6M

6in Probe Station kit, scope not included, 2 mid-size micropositioners, probe holders and 1 box of tips

AUD

10560

 

or

$

9261

Probe Station kit for use with 6" wafers, Mitutoyo Stereo Zoom microscope not included, supply your own, 2 ball bearing micropositioners, probe holders, and 1 box of probe tips.
This Probe Station is well suited for advanced measurements. It offers most of the capabilities of larger units. A 8" version is available.
FEATURES:
Compact size, 520 wide x 520 deep x 400 mm high (20.5" x 20.5" x 16")
Low weight, 99 lbs without scope
Affordable price
Ideal for 6" wafers
Chuck stage front and side adjustable
Chuck theta adjustable
Backlash-free movement
1 year manufacturer warranty

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$

9261

€

7432

£

6082

AUD

10560

Rs440195

Exchange rates for prices in Euro, GBP, AUD, Rs were valid on posting date, will be adjusted to invoice date if necessary.

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No scope included

SPECIFICATIONS:
6" stainless steel vacuum chuck
Chuck stage allows 6" x 6" travel in X-Y directions
Chuck theta is adjustable by 30 degrees
Vacuum hold down additionally configurable for 5", 3" wafers, or dies
Z adjustment by moving platen up or down

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